| 1. | It adopts the intermediate frequency power ; it not only can plate single films or multilayer membrane , such as titanium nitrides , titanium carbide , zirconium nitrides , chromium nitride , titanium , nickel , chromium and copper etc . but also can plate the ito , al2o3 , sio2 , tio2 and zro etc . furthermore , it can plate multilayer membrane after being equipped with multi - targets with top grade quality and fast speed , as well as advantages of other plating methods ; therefore it is one super - hard membrane equipment with excellent performance
采用先进的中频电源，溅射速度快，不但可以镀制氮化钛碳化钛氮化锆氮化铬及钛镍铬铜金银等等单一膜层或复合膜层，而且可以镀制铟锡合金ito氧化铝al2o3二氧化硅sio2氧化钛tio2氧化锆zro等等膜层，另外其配置多靶可以镀制多层膜，不但镀制膜层细腻而且镀制速度非常快，兼有其他镀法的优点，所以是一种性能非常优良的镀制超硬膜设备。 |
